Description - Handbook of Silicon Semiconductor Metrology by Alain C. Diebold
A description of cleanroom-based measurement technology used during the manufacture of silicon integrated circuits. It covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. It surveys key areas such as optical measurements and in-line calibration methods.
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Handbook of Semiconductor Manufacturing Technology, Second Edition
